Effect of pressure on plasma-assisted chemical vapor deposition of silicon oxide(s)

被引：0

作者：

Banerjee, Aditi ^{[1
]}

DebRoy, Tarasankar ^{[1
]}

机构：

[1] Pennsylvania State Univ, University Park, United States

来源：

Journal of the American Ceramic Society | 1994年 / 77卷 / 05期

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D O I：

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摘要：

引用

页码：1366 / 1368

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