Properties of reactively RF magnetron-sputtered chromium nitride coatings

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作者：
Bertrand, Ghislaine [1 ]
Savall, Catherine [1 ]
Meunier, Cathy [1 ]
机构：
[1] Lab de Metrologie des Interfaces, Techniques, Montbeliard, France
来源：
Surface and Coatings Technology | 1997年 / 96卷 / 2-3期
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页码：323 / 329
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