Properties of reactively RF magnetron-sputtered chromium nitride coatings

被引：0
|
作者：
Bertrand, Ghislaine [1 ]
Savall, Catherine [1 ]
Meunier, Cathy [1 ]
机构：
[1] Lab de Metrologie des Interfaces, Techniques, Montbeliard, France
来源：
Surface and Coatings Technology | 1997年 / 96卷 / 2-3期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：323 / 329
相关论文
共 50 条
  • [21] Recent developments in magnetron-sputtered silicon nitride coatings of improved mechanical and tribological properties for extreme situations
    Akula Umamaheswara Rao
    Sunil Kumar Tiwari
    Manjeet Singh Goyat
    Amit Kumar Chawla
    Journal of Materials Science, 2023, 58 : 9755 - 9804
  • [22] Recent developments in magnetron-sputtered silicon nitride coatings of improved mechanical and tribological properties for extreme situations
    Rao, Akula Umamaheswara
    Tiwari, Sunil Kumar
    Goyat, Manjeet Singh
    Chawla, Amit Kumar
    JOURNAL OF MATERIALS SCIENCE, 2023, 58 (24) : 9755 - 9804
  • [23] Magnetron-sputtered carbon nitride (CNx) films
    Kola, P.V.
    Cameron, D.C.
    Meenan, B.J.
    Pischow, K.A.
    Anderson, C.A.
    Brown, N.M.D.
    Hashmi, M.S.J.
    Surface and Coatings Technology, 1995, 75 (1 -3 pt 2) : 696 - 703
  • [24] RF MAGNETRON-SPUTTERED INDIUM TIN OXIDE FILM ON A REACTIVELY ION-ETCHED ACRYLIC SUBSTRATE
    CHIOU, BS
    HSIEH, ST
    THIN SOLID FILMS, 1993, 229 (02) : 146 - 155
  • [25] Structural and Optical Properties of Magnetron-Sputtered Chromium Oxynitride Thin Films
    Khalil, Maria
    Bashir, Aneeqa
    Khalil, Umara
    Ullah, Farman
    Ramay, Shahid M.
    Saleem, Murtaza
    ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, 2024, 13 (08)
  • [26] Magnetron-sputtered Be coatings as reflectors for ultracold neutrons
    Brys, T
    Daum, M
    Fierlinger, P
    Fomin, A
    Geltenbort, P
    Henneck, R
    Kirch, K
    Kharitonov, A
    Krasnoshekova, I
    Kuzniak, M
    Lasakov, M
    Pichlmaier, A
    Raimondi, F
    Schelldorfer, R
    Serebrov, A
    Siber, E
    Tal'daev, R
    Varlamov, V
    Vasiliev, A
    Wambach, J
    Zherebtsov, O
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2005, 551 (2-3): : 429 - 447
  • [27] STRUCTURE AND PROPERTIES OF MAGNETRON-SPUTTERED TI-V-N COATINGS
    KNOTEK, O
    BARIMANI, A
    BOSSERHOFF, B
    LOFFLER, F
    THIN SOLID FILMS, 1990, 193 (1-2) : 557 - 564
  • [28] REACTIVELY SPUTTERED DOPED HAFNIUM NITRIDE COATINGS
    SPROUL, WD
    SURFACE & COATINGS TECHNOLOGY, 1988, 36 (1-2): : 191 - 198
  • [29] The influence of deposition parameters on the structure and properties of magnetron-sputtered titania coatings
    Onifade, AA
    Kelly, PJ
    THIN SOLID FILMS, 2006, 494 (1-2) : 8 - 12
  • [30] Influence of rapid heating with infrared radiation on RF magnetron-sputtered calcium phosphate coatings
    Yoshinari, M
    Hayakawa, T
    Wolke, JGC
    Nemoto, K
    Jansen, JA
    JOURNAL OF BIOMEDICAL MATERIALS RESEARCH, 1997, 37 (01): : 60 - 67
12345