NUCLEATION PROPERTIES OF MAGNETRON-SPUTTERED TANTALUM

被引：26
|
作者：
SATO, S
机构：
来源：
THIN SOLID FILMS | 1982年 / 94卷 / 04期
关键词：
D O I：
10.1016/0040-6090(82)90493-X
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：321 / 329
页数：9
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