Micromachined inertial devices

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作者：
Sichuan Inst of Piezoelectric &, Acoustooptic Technology, Chongqing, China [1 ]
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来源：
Yadian Yu Shengguang/Piezoelectrics and Acoustooptics | 1997年 / 19卷 / 06期
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(Edited Abstract)
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页码：375 / 380
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