Characterization techniques for surface-micromachined devices

被引：9

作者：

Eaton, WP ^{[1
]}

Smith, NF ^{[1
]}

Irwin, L ^{[1
]}

Tanner, DM ^{[1
]}

机构：

[1] Sandia Natl Labs, Albuquerque, NM 87185 USA

来源：

MICROMACHINED DEVICES AND COMPONENTS IV | 1998年 / 3514卷

关键词：

D O I：

10.1117/12.323919

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Using a microengine as the primary test vehicle, we have examined several aspects of characterization. Parametric measurements provide fabrication process information. Drive signal optimization is necessary for increased microengine performance. Finally, electrical characterization of resonant frequency and quality factor can be more accurate than visual techniques.

引用

页码：431 / 438

页数：8

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