Micromachined silicon submount for optical communication devices

被引：0

作者：

Ishii, Yorishige ^{[1
]}

Matsuo, Toshihisa ^{[1
]}

Fujita, Hideaki ^{[1
]}

Iwaki, Tetsuo ^{[2
]}

Sekimoto, Yoshihiro ^{[1
]}

Kurata, Yukio ^{[1
]}

机构：

[1] Precision Technology Development Center, SHARP Corporation, 2613-1 Ichinomoto-cho, Tenri, Nara 632-8567, Japan

[2] Design Systems Development Center, SHARP Corporation, 2613-1 Ichinomoto-cho, Tenri, Nara 632-8567, Japan

来源：

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2006年 / 45卷 / 12期

关键词：

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Journal article (JA)

引用

页码：9088 / 9093

共 50 条

[1] Micromachined silicon submount for optical communication devices
Ishii, Yorishige
Matsuo, Toshihisa
Fujita, Hideaki
Iwaki, Tetsuo
Sekimoto, Yoshihiro
Kurata, Yukio
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2006, 45 (12): : 9088 - 9093
[2] A micromachined silicon-submount package for vertical emission of edge emitting laser diodes
Shie, JS
Yu, SH
SENSORS AND ACTUATORS A-PHYSICAL, 2000, 82 (1-3) : 297 - 301
[3] A modular environment for the design of micromachined silicon devices
Steffensen, L
Than, O
Buttgenbach, S
TRANSDUCERS 97 - 1997 INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS AND ACTUATORS, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 1997, : 1023 - 1026
[4] An optical network of silicon micromachined sensors
Wilson, ML
Burns, DW
Zook, JD
MINIATURIZED SYSTEMS WITH MICRO-OPTICS AND MICROMECHANICS, 1996, 2687 : 78 - 88
[5] MICROMACHINED OPTICAL PLANES AND REFLECTORS IN SILICON
ROSENGREN, L
SMITH, L
BACKLUND, Y
SENSORS AND ACTUATORS A-PHYSICAL, 1994, 41 (1-3) : 330 - 333
[6] Polymer optical waveguides on micromachined silicon
Emelli, E.
Pozzi, F.
CSELT Technical Reports, 2000, 28 (01): : 19 - 25
[7] BICEPS:: a modular environment for the design of micromachined silicon devices
Steffensen, L
Than, O
Büttgenbach, S
SENSORS AND ACTUATORS A-PHYSICAL, 2000, 79 (01) : 76 - 81
[8] Dry isotropic oxide etch for silicon micromachined devices
Ranganathan, N
Radhakrishnan, MK
PROCEEDINGS OF THE ELEVENTH INTERNATIONAL WORKSHOP ON THE PHYSICS OF SEMICONDUCTOR DEVICES, VOL 1 & 2, 2002, 4746 : 481 - 484
[9] Analysis challenges for reliability improvement in silicon micromachined devices
Radhakrishnan, MK
SMART MATERIALS, STRUCTURES, AND SYSTEM, PTS 1 AND 2, 2003, 5062 : 846 - 852
[10] Optical crossconnection by silicon micromachined torsion mirrors
Toshiyoshi, H
Fujita, H
IEEE/LEOS 1996 SUMMER TOPICAL MEETINGS - ADVANCED APPLICATIONS OF LASERS IN MATERIALS AND PROCESSING, DIGEST, 1996, : C63 - C64

← 1 2 3 4 5 →