Micromachined silicon submount for optical communication devices

被引：0
|
作者：
Ishii, Yorishige [1 ]
Matsuo, Toshihisa [1 ]
Fujita, Hideaki [1 ]
Iwaki, Tetsuo [2 ]
Sekimoto, Yoshihiro [1 ]
Kurata, Yukio [1 ]
机构：
[1] Precision Technology Development Center, SHARP Corporation, 2613-1 Ichinomoto-cho, Tenri, Nara 632-8567, Japan
[2] Design Systems Development Center, SHARP Corporation, 2613-1 Ichinomoto-cho, Tenri, Nara 632-8567, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2006年 / 45卷 / 12期
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Journal article (JA)
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页码：9088 / 9093
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