Photoluminescence study of ion-implanted silicon

被引：0
|
作者：
Terashima, Koichi [1 ]
Ikarashi, Taeko [1 ]
Watanabe, Masahito [1 ]
Kitano, Tomohisa [1 ]
机构：
[1] Silicon Systems Research Lab
来源：
NEC Research and Development | 1998年 / 39卷 / 03期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：289 / 298
相关论文
共 50 条
  • [41] DISPLACEMENT AND RECOIL IN ION-IMPLANTED SILICON
    MEDA, L
    CEROFOLINI, GF
    OTTAVIANI, G
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 19-20 : 454 - 456
  • [42] AVOIDING DISLOCATIONS IN ION-IMPLANTED SILICON
    SARIS, FW
    CUSTER, JS
    SCHREUTELKAMP, RJ
    LIEFTING, RJ
    WIJBURG, R
    WALLINGA, H
    MICROELECTRONIC ENGINEERING, 1992, 19 (1-4) : 357 - 362
  • [43] Athermal anneaung of ion-implanted silicon
    Lojek, B
    Whiteman, N
    Abrenkiel, R
    9TH INTERNATIONAL CONFERENCE ON ADVANCED THERMAL PROCESSING OF SEMICONDUCTORS - RTP 2001, 2001, : 125 - 131
  • [44] DAMAGE PROFILES IN ION-IMPLANTED SILICON
    TKACHEV, VD
    HOLZER, G
    CHELYADINSKII, AR
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1984, 85 (01): : K43 - K46
  • [45] DIFFUSION OF ION-IMPLANTED ARSENIC IN SILICON
    FAIR, RB
    TSAI, JCC
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1975, 122 (12) : 1689 - 1696
  • [46] Internal friction in ion-implanted silicon
    Liu, X
    Pohl, RO
    Crandall, RS
    Jones, KM
    DEFECTS AND DIFFUSION IN SILICON PROCESSING, 1997, 469 : 419 - 424
  • [47] ION-IMPLANTED SILICON PROFILES IN GAAS
    LEE, DH
    MALBON, RM
    APPLIED PHYSICS LETTERS, 1977, 30 (07) : 327 - 329
  • [48] DIFFUSION OF ION-IMPLANTED ARSENIC IN SILICON
    FAIR, RB
    TSAI, JCC
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1975, 122 (08) : C258 - C258
  • [49] Raman spectroscopy of ion-implanted silicon
    Tuschel, DD
    Lavine, JP
    MICROSTRUCTURE EVOLUTION DURING IRRADIATION, 1997, 439 : 47 - 52
  • [50] CHARACTERISTICS OF BCL ION-IMPLANTED SILICON
    DELFINO, M
    LUNNON, ME
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1984, 131 (11) : C470 - C470
12345