SOLID-PHASE EPITAXIAL GROWTH OF POLYCRYSTALLINE SILICON FILMS AMORPHIZED BY ION IMPLANTATION.

被引：0

作者：

Quach, N.T. ^{[1
]}

Reif, R. ^{[1
]}

机构：

[1] MIT, Dep of Electrical Engineering, & Computer Science, Cambridge,, MA, USA, MIT, Dep of Electrical Engineering & Computer Science, Cambridge, MA, USA

来源：

| 1600年 / 02期

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D O I：

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摘要：

SEMICONDUCTING SILICON

引用

共 50 条

[41] IDENTIFICATION OF KEY VARIABLES IN THE SOLID-PHASE EPITAXIAL-GROWTH OF SILICON
OTTAVIANI, G
MAJNI, G
JOURNAL OF APPLIED PHYSICS, 1979, 50 (11) : 6865 - 6869
[42] Solid phase epitaxial regrowth of ion beam-amorphized α-quartz
Roccaforte, F
Bolse, W
Lieb, KP
APPLIED PHYSICS LETTERS, 1998, 73 (10) : 1349 - 1351
[43] POLYCRYSTALLINE SILICON THIN-FILMS PROCESSED WITH SILICON ION-IMPLANTATION AND SUBSEQUENT SOLID-PHASE CRYSTALLIZATION - THEORY, EXPERIMENTS, AND THIN-FILM-TRANSISTOR APPLICATIONS
YAMAUCHI, N
REIF, R
JOURNAL OF APPLIED PHYSICS, 1994, 75 (07) : 3235 - 3257
[44] DEFECTS IN AMORPHOUS AND SOLID-PHASE EPITAXIAL SILICON
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HASAN, MA
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THIN SOLID FILMS, 1994, 240 (1-2) : 39 - 44
[45] SOLID-PHASE EPITAXIAL REGROWTH PHENOMENA IN SILICON
WILLIAMS, JS
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 209 (MAY): : 219 - 228
[46] ION-IRRADIATION-INDUCED SOLID-PHASE EPITAXIAL-GROWTH
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PHILOSOPHICAL MAGAZINE LETTERS, 1989, 59 (05) : 223 - 227
[47] CONTROL OF SOLID-PHASE EPITAXIAL-GROWTH IN THE PD-SI SYSTEM BY CARBON ION-IMPLANTATION
ISHIWARA, H
SAITOH, S
FURUKAWA, S
JAPANESE JOURNAL OF APPLIED PHYSICS, 1980, 19 (05) : 831 - 837
[48] Investigation of the solid-phase epitaxial growth of amorphized GaAs with in-situ and ex-situ electron microscopy
Belay, KB
Ridgway, MC
Llewellyn, DJ
SEMICONDUCTING AND INSULATING MATERIALS, 1996: PROCEEDINGS OF THE 9TH CONFERENCE ON SEMICONDUCTING AND INSULATING MATERIALS (SIMC'96), 1996, : 45 - 50
[49] SOLID-PHASE-EPITAXIAL GROWTH IN ION-IMPLANTED SILICON
NARAYAN, J
HOLLAND, OW
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1982, 73 (01): : 225 - 236
[50] CRYSTALLINE QUALITIES OF SILICON LAYERS FORMED BY SOLID-PHASE EPITAXIAL-GROWTH
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NICOLET, MA
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