SOLID-PHASE EPITAXIAL GROWTH OF POLYCRYSTALLINE SILICON FILMS AMORPHIZED BY ION IMPLANTATION.

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作者：
Quach, N.T. [1 ]
Reif, R. [1 ]
机构：
[1] MIT, Dep of Electrical Engineering, & Computer Science, Cambridge,, MA, USA, MIT, Dep of Electrical Engineering & Computer Science, Cambridge, MA, USA
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| 1600年 / 02期
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摘要：
SEMICONDUCTING SILICON
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