SPECIAL TECHNIQUES FOR THE AUGER ANALYSIS OF MICROELECTRONIC DEVICES.

被引：0

作者：

Leung, M.S. ^{[1
]}

Stupian, G.W. ^{[1
]}

机构：

[1] Aerospace Corp, El Segundo, CA, USA, Aerospace Corp, El Segundo, CA, USA

来源：

Applied Surface Science | 1985年 / 29卷 / 04期

关键词：

AUGER ANALYSIS - DEPTH PROFILING - MICROELECTRONIC DEVICES;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

(Edited Abstract)

引用

页码：435 / 445

共 50 条

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