SPECIAL TECHNIQUES FOR THE AUGER ANALYSIS OF MICROELECTRONIC DEVICES.

被引：0
|
作者：
Leung, M.S. [1 ]
Stupian, G.W. [1 ]
机构：
[1] Aerospace Corp, El Segundo, CA, USA, Aerospace Corp, El Segundo, CA, USA
来源：
Applied Surface Science | 1985年 / 29卷 / 04期
关键词：
AUGER ANALYSIS - DEPTH PROFILING - MICROELECTRONIC DEVICES;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
(Edited Abstract)
引用
收藏
页码：435 / 445
相关论文
共 50 条
  • [41] POWER DEVICES.
    Anon
    Electronic Engineering (London), 1987, 59 (727): : 48 - 68
  • [42] ANALYSIS STRATEGY FOR INTERNAL MEASUREMENTS ON VLSI DEVICES.
    Kolzer, Jochen
    Frieling, Focko
    Cutter, David
    Microelectronic Engineering, 1987, 6 (1-4) : 23 - 28
  • [43] Meta-analysis of glaucoma drainage devices.
    Hong, C
    Patel, RN
    Ayyala, RS
    INVESTIGATIVE OPHTHALMOLOGY & VISUAL SCIENCE, 2001, 42 (04) : S552 - S552
  • [44] NEW APPROACH TO THERMAL ANALYSIS OF POWER DEVICES.
    Leturcq, Philippe
    Dorkel, Jean-Marie
    Napieralski, Andrzej
    Lachiver, Eric
    IEEE Transactions on Electron Devices, 1987, ED-34 (05) : 1147 - 1156
  • [45] Algorithm for Analysis of Competitions in Discrete Sequential Devices.
    Sinel'nikov, V.E.
    Izvestiya Vysshikh Uchebnykh Zavedenii, Elektromekhanika, 1975, (11): : 1234 - 1241
  • [46] SPHEROMETRY: DESCRIPTION AND ERROR ANALYSIS OF PORTABLE DEVICES.
    Bar-Shay, A.
    Precision Engineering, 1987, 9 (01) : 7 - 18
  • [47] Auto focus and image registration techniques for infrared imaging of microelectronic devices
    Florian, Daniela
    Koeck, Helmut
    Plankensteiner, Kathrin
    Glavanovics, Michael
    MEASUREMENT SCIENCE AND TECHNOLOGY, 2013, 24 (07)
  • [48] STANDARD FOR SAFETY MARINE SPECIAL PURPOSE WATER SAFETY BUOYANT DEVICES.
    Anon
    American National Standards Institute, Standards, 1972,
  • [49] Performance increase through new type vehicles and simple special devices.
    不详
    ZEITSCHRIFT DES VEREINES DEUTSCHER INGENIEURE, 1943, 87 : 473 - 473
  • [50] Recent techniques in the fabrication and optimization of organic light-emitting devices.
    Jabbour, GE
    Pardo, D
    Peyghambarian, N
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2000, 220 : U344 - U344
12345