SPECIAL TECHNIQUES FOR THE AUGER ANALYSIS OF MICROELECTRONIC DEVICES.

被引：0
|
作者：
Leung, M.S. [1 ]
Stupian, G.W. [1 ]
机构：
[1] Aerospace Corp, El Segundo, CA, USA, Aerospace Corp, El Segundo, CA, USA
来源：
Applied Surface Science | 1985年 / 29卷 / 04期
关键词：
AUGER ANALYSIS - DEPTH PROFILING - MICROELECTRONIC DEVICES;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
(Edited Abstract)
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页码：435 / 445
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