Micro-hotplate for integrated thin-film gas sensors

被引：0
|
作者：
Fung, Samuel K.H. [1 ]
Tang, Zhenan [1 ]
Chan, Philip C.H. [1 ]
Sin, Johnny K.O. [1 ]
Cheung, Peter W. [1 ]
机构：
[1] Hong Kong Univ of Science and, Technology, Hong Kong
来源：
Journal of the Chinese Institute of Electrical Engineering, Transactions of the Chinese Institute of Engineers, Series E/Chung KuoTien Chi Kung Chieng Hsueh K'an | 1995年 / 2卷 / 01期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：75 / 79
相关论文
共 50 条
  • [1] An integrated gas sensor based on tin oxide thin-film and improved micro-hotplate
    Tang, Z
    Fung, SKH
    Wong, DTW
    Chan, PCH
    Sin, JKO
    Cheung, PW
    SENSORS AND ACTUATORS B-CHEMICAL, 1998, 46 (03) : 174 - 179
  • [2] Integrated gas sensor based on tin oxide thin-film and improved micro-hotplate
    Hong Kong Univ of Science and, Technology, Hong Kong, Hong Kong
    Sens Actuators, B Chem, 3 (174-179):
  • [3] Design and simulations of SOICMOS micro-hotplate gas sensors
    Udrea, F
    Gardner, JW
    Setiadi, D
    Covington, JA
    Dogaru, T
    Lua, CC
    Milne, WI
    SENSORS AND ACTUATORS B-CHEMICAL, 2001, 78 (1-3) : 180 - 190
  • [4] The integration of SnO2 thin-film onto micro-hotplate for gas sensor applications
    Sheng, LY
    Chan, PCH
    Sin, JKO
    1997 IEEE HONG KONG ELECTRON DEVICES MEETING, PROCEEDINGS, 1997, : 145 - 148
  • [5] Modeling micro-hotplate chemical gas sensors.
    Ding, JH
    McAvoy, TJ
    Adomaitis, R
    Semancik, S
    Cavicchi, R
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1999, 218 : U1065 - U1065
  • [6] Dielectric micro-hotplate for integrated sensors:: an electro-thermomechanical analysis
    Puigcorbé, J
    Vilà, A
    Gràcia, I
    Cané, C
    Morante, JR
    TRANSDUCERS '01: EUROSENSORS XV, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2001, : 312 - 315
  • [7] FAST TEMPERATURE-PROGRAMMED SENSING FOR MICRO-HOTPLATE GAS SENSORS
    CAVICCHI, RE
    SUEHLE, JS
    KREIDER, KG
    GAITAN, M
    CHAPARALA, P
    IEEE ELECTRON DEVICE LETTERS, 1995, 16 (06) : 286 - 288
  • [8] MEMS-based formaldehyde gas sensor integrated with a micro-hotplate
    Chia-Yen Lee
    Ping-Ru Hsieh
    Che-Hsin Lin
    Po-Cheng Chou
    Lung-Ming Fu
    Che-Ming Chiang
    Microsystem Technologies, 2006, 12 : 893 - 898
  • [9] MEMS-based formaldehyde gas sensor integrated with a micro-hotplate
    Lee, Chia-Yen
    Hsieh, Ping-Ru
    Lin, Che-Hsin
    Chou, Po-Cheng
    Fu, Lung-Ming
    Chiang, Che-Ming
    MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2006, 12 (10-11): : 893 - 898
  • [10] Optimized multi-frequency temperature modulation of micro-hotplate gas sensors
    Vergara, A
    Llobet, E
    Brezmes, J
    Vilanova, X
    Stankova, M
    Gràcia, I
    Cané, C
    Correig, X
    PROCEEDINGS OF THE IEEE SENSORS 2004, VOLS 1-3, 2004, : 1392 - 1395
12345