Micro-hotplate for integrated thin-film gas sensors

被引：0
|
作者：
Fung, Samuel K.H. [1 ]
Tang, Zhenan [1 ]
Chan, Philip C.H. [1 ]
Sin, Johnny K.O. [1 ]
Cheung, Peter W. [1 ]
机构：
[1] Hong Kong Univ of Science and, Technology, Hong Kong
来源：
Journal of the Chinese Institute of Electrical Engineering, Transactions of the Chinese Institute of Engineers, Series E/Chung KuoTien Chi Kung Chieng Hsueh K'an | 1995年 / 2卷 / 01期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：75 / 79
相关论文
共 50 条
  • [21] Approach demonstrated for optimizing response of micro-hotplate chemical sensors
    不详
    JOURNAL OF RESEARCH OF THE NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY, 1996, 101 (06): : 837 - 837
  • [22] SOI-based micro-hotplate microcalorimeter gas sensor with integrated BiCMOS transducer
    Gardner, JW
    Covington, JA
    Udrea, F
    Dogaru, T
    Lu, CC
    Milne, W
    TRANSDUCERS '01: EUROSENSORS XV, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2001, : 1688 - 1691
  • [23] Fabrication of a MEMS micro-hotplate
    Yi, Xian
    Lai, Jianjun
    Liang, Huafeng
    Zhai, Xiaofeng
    3RD INTERNATIONAL PHOTONICS AND OPTOELECTRONICS MEETINGS (POEM 2010), 2011, 276
  • [24] Nanowire Hydrogen Gas Sensor Employing CMOS Micro-hotplate
    Ali, S. Z.
    Santra, S.
    Haneef, I.
    Schwandt, C.
    Kumar, R. V.
    Milne, W. I.
    Udrea, F.
    Guha, P. K.
    Covington, J. A.
    Gardner, J. W.
    Garofalo, V.
    2009 IEEE SENSORS, VOLS 1-3, 2009, : 114 - +
  • [25] Oxygen and Humidity Sensing Property of a Limiting Current-Type Thin-Film YSZ-Based Sensor on a Micro-Hotplate
    Akasaka, Shunsuke
    Kanno, Isaku
    2022 IEEE SENSORS, 2022,
  • [26] THIN-FILM GAS SENSORS
    EMMER, I
    INTERNATIONAL JOURNAL OF ELECTRONICS, 1992, 73 (05) : 875 - 879
  • [27] Development of micro-hotplate and its reliability for gas sensing applications
    Mahanth Prasad
    Partha S. Dutta
    Applied Physics A, 2018, 124
  • [28] A Micro-hotplate for MEMS Gas Sensor Wafer Level Packaging
    Zhang, Zhaohua
    Zhao, Xuewei
    Wang, Deyan
    Duan, Guotao
    Xing, Chaoyang
    2023 24TH INTERNATIONAL CONFERENCE ON ELECTRONIC PACKAGING TECHNOLOGY, ICEPT, 2023,
  • [29] Development of micro-hotplate and its reliability for gas sensing applications
    Prasad, Mahanth
    Dutta, Partha S.
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2018, 124 (11):
  • [30] Micro-Hotplate Devices for Micro-SOFC
    Beckel, D.
    Briand, D.
    Courbat, J.
    Bieberle-Huetter, A.
    de Rooij, N. F.
    Gauckler, L. J.
    SOLID OXIDE FUEL CELLS 10 (SOFC-X), PTS 1 AND 2, 2007, 7 (01): : 421 - +
12345