Oxygen and Humidity Sensing Property of a Limiting Current-Type Thin-Film YSZ-Based Sensor on a Micro-Hotplate

被引：0
|
作者：
Akasaka, Shunsuke [1 ,2 ]
Kanno, Isaku [2 ]
机构：
[1] ROHM Co Ltd, Ukyo Ku, 21 Saiin Mizosaki Cho, Kyoto 6158585, Japan
[2] Kobe Univ, Dept Mech Engn, Nada Ku, 1-1 Rokkodai Cho, Kobe, Hyogo 6578501, Japan
来源：
2022 IEEE SENSORS | 2022年
关键词：
micro-hotplate; limiting current; oxygen gas sensor; humidity sensor; yttria-stabilized-zirconia; MICROHEATER; FABRICATION;
D O I：
10.1109/SENSORS52175.2022.9967243
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this study, we fabricated a limiting current-type microelectromechanical system (MEMS) sensor and evaluated its sensing performance of oxygen and humidity concentration. The MEMS oxygen and humidity sensor consisted of a thin-film YSZ-based sensing element on a cantilever-shaped micro-hotplate. The thin-film YSZ layer was electrically heated by a Pt heater of the cantilever-shaped micro-hotplate. The limiting current characteristics were observed above 575 degrees C. We confirmed the limiting current proportionally increased with oxygen concentration. In contrast, the limiting current increased with humidity at a higher bias voltage. These results indicate that both of oxygen and humidity concentration can be separately measured by selecting the bias voltage to the YSZ thin film.
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页数：4
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