An integrated gas sensor based on tin oxide thin-film and improved micro-hotplate

被引：29
|
作者：
Tang, Z [1 ]
Fung, SKH [1 ]
Wong, DTW [1 ]
Chan, PCH [1 ]
Sin, JKO [1 ]
Cheung, PW [1 ]
机构：
[1] Hong Kong Univ Sci & Technol, Dept Elect & Elect Engn, Hong Kong, Hong Kong
来源：
SENSORS AND ACTUATORS B-CHEMICAL | 1998年 / 46卷 / 03期
关键词：
integrated gas sensor; tin oxide thin-film; micro-hotplate;
D O I：
10.1016/S0925-4005(98)00118-X
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
The fabrication and characterization of an integrated gas sensor based on tin oxide thin-film and improved micro-hotplate (MHP) are presented in this paper. Tin oxide thin-films are sputtered onto the MHP from tin dioxide target or pure tin metal target under different sputtering conditions. The properties of the films are analyzed by scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS). The sensors are characterized in an automated precision characterization system. Sensors are characterized in both dynamic and static modes. In the dynamic mode, a gas analyzer is used to extract the gas out of the measurement chamber. In the static mode, the gas analyzer is replaced by a gas chromatography port. (C) 1998 Elsevier Science S.A. All rights reserved.
引用
收藏
页码：174 / 179
页数：6
相关论文
共 50 条
  • [1] The integration of SnO2 thin-film onto micro-hotplate for gas sensor applications
    Sheng, LY
    Chan, PCH
    Sin, JKO
    [J]. 1997 IEEE HONG KONG ELECTRON DEVICES MEETING, PROCEEDINGS, 1997, : 145 - 148
  • [2] MEMS-based formaldehyde gas sensor integrated with a micro-hotplate
    Chia-Yen Lee
    Ping-Ru Hsieh
    Che-Hsin Lin
    Po-Cheng Chou
    Lung-Ming Fu
    Che-Ming Chiang
    [J]. Microsystem Technologies, 2006, 12 : 893 - 898
  • [3] A Micro-Hotplate for MEMS Based Gas Sensor
    Niu, Gaoqiang
    He, Lingxiang
    Yang, Zhitao
    Zhao, Changhui
    Gong, Hiuming
    He, Wei
    Wang, Fei
    [J]. 2018 19TH INTERNATIONAL CONFERENCE ON ELECTRONIC PACKAGING TECHNOLOGY (ICEPT), 2018, : 749 - 752
  • [4] MEMS-based formaldehyde gas sensor integrated with a micro-hotplate
    Lee, Chia-Yen
    Hsieh, Ping-Ru
    Lin, Che-Hsin
    Chou, Po-Cheng
    Fu, Lung-Ming
    Chiang, Che-Ming
    [J]. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2006, 12 (10-11): : 893 - 898
  • [5] A new micro sensor array with porous tin oxide thin films and micro-hotplate dangled by wires in air
    Lee, DS
    Shim, CH
    Lim, JW
    Huh, JS
    Lee, DD
    [J]. TRANSDUCERS '01: EUROSENSORS XV, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2001, : 1704 - 1707
  • [6] Optimization of A Novel Micro-hotplate for Gas Sensor
    Li, Changchun
    Zhang, Xiaobo
    Liu, Li
    [J]. APPLIED MATERIALS AND TECHNOLOGIES FOR MODERN MANUFACTURING, PTS 1-4, 2013, 423-426 : 2317 - +
  • [7] SOI-based micro-hotplate microcalorimeter gas sensor with integrated BiCMOS transducer
    Gardner, JW
    Covington, JA
    Udrea, F
    Dogaru, T
    Lu, CC
    Milne, W
    [J]. TRANSDUCERS '01: EUROSENSORS XV, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2001, : 1688 - 1691
  • [8] Thermal analysis and design of a micro-hotplate for integrated gas-sensor applications
    Fung, SKH
    Tang, ZN
    Chan, PCH
    Sin, JKO
    Cheung, PW
    [J]. SENSORS AND ACTUATORS A-PHYSICAL, 1996, 54 (1-3) : 482 - 487
  • [9] A Novel Micro-hotplate Designed for micro-gas Sensor
    Li, Ji
    Zhang, Xiaobo
    Liu, Li
    [J]. INFORMATION TECHNOLOGY APPLICATIONS IN INDUSTRY II, PTS 1-4, 2013, 411-414 : 1569 - +
  • [10] Investigation of stability and reliability of tin oxide thin-film for integrated micro-machined gas sensor devices
    Sharma, RK
    Chan, PCH
    Tang, ZN
    Yan, GZ
    Hsing, IM
    Sin, JKO
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 2001, 81 (01) : 9 - 16
12345