Thermal analysis and design of a micro-hotplate for integrated gas-sensor applications

被引：66
|
作者：
Fung, SKH [1 ]
Tang, ZN [1 ]
Chan, PCH [1 ]
Sin, JKO [1 ]
Cheung, PW [1 ]
机构：
[1] DALIAN UNIV TECHNOL,DALIAN,PEOPLES R CHINA
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 1996年 / 54卷 / 1-3期
关键词：
thin-film gas sensors; temperature control; micro-hotplates; finite-element analysis; microfabrication techniques;
D O I：
10.1016/S0924-4247(97)80008-8
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The application of commercial mechanical computer-aided engineering (MCAE) software to the design and analysis of micro-hotplate (MHP) structures is presented. The simulation provides an estimation of heating efficiency and temperature distribution on the hotplate. The analysis is applied to a newly proposed MHP structure during layout design. Novel design results in a hotplate with high heating efficiency, good temperature uniformity and ease of temperature sensing. The simulation result has been compared with experimental measurement. For the first time, liquid crystal thermography is used to visualize the temperature profile on the hotplate.
引用
收藏
页码：482 / 487
页数：6
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