An integrated gas sensor based on tin oxide thin-film and improved micro-hotplate

被引：29
|
作者：
Tang, Z [1 ]
Fung, SKH [1 ]
Wong, DTW [1 ]
Chan, PCH [1 ]
Sin, JKO [1 ]
Cheung, PW [1 ]
机构：
[1] Hong Kong Univ Sci & Technol, Dept Elect & Elect Engn, Hong Kong, Hong Kong
来源：
SENSORS AND ACTUATORS B-CHEMICAL | 1998年 / 46卷 / 03期
关键词：
integrated gas sensor; tin oxide thin-film; micro-hotplate;
D O I：
10.1016/S0925-4005(98)00118-X
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
The fabrication and characterization of an integrated gas sensor based on tin oxide thin-film and improved micro-hotplate (MHP) are presented in this paper. Tin oxide thin-films are sputtered onto the MHP from tin dioxide target or pure tin metal target under different sputtering conditions. The properties of the films are analyzed by scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS). The sensors are characterized in an automated precision characterization system. Sensors are characterized in both dynamic and static modes. In the dynamic mode, a gas analyzer is used to extract the gas out of the measurement chamber. In the static mode, the gas analyzer is replaced by a gas chromatography port. (C) 1998 Elsevier Science S.A. All rights reserved.
引用
收藏
页码：174 / 179
页数：6
相关论文
共 50 条
  • [31] A thin-film tin-oxide carbon monoxide sensor for exhaust gas analysis
    Williams, EW
    Tomlinson, N
    Cheney, MT
    Keeling, AG
    [J]. JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2000, 11 (04) : 369 - 372
  • [32] Interaction between thin-film tin oxide gas sensor and five organic vapors
    Gong, H
    Wang, YJ
    Teo, SC
    Huang, L
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 1999, 54 (03) : 232 - 235
  • [33] A thin-film tin-oxide carbon monoxide sensor for exhaust gas analysis
    E. W. Williams
    N. Tomlinson
    M. T. Cheney
    A. G. Keeling
    [J]. Journal of Materials Science: Materials in Electronics, 2000, 11 : 369 - 372
  • [34] Development of LTCC micro-hotplate with PTC temperature sensor for gas-sensing applications
    Kulhari, Lokesh
    Ray, Kanad
    Paptan, Ankit
    Suri, Nikhil
    Khanna, Pramod K.
    [J]. INTERNATIONAL JOURNAL OF APPLIED CERAMIC TECHNOLOGY, 2020, 17 (03) : 1430 - 1439
  • [35] A MICRO-HOTPLATE FOR MEMS-BASED H2S SENSOR
    Niu, Gaoqiang
    Zhao, Changhui
    Gong, Huimin
    Hu, Yushen
    Zhang, Yulong
    Zhou, Zhitao
    Tao, Tiger H.
    Wang, Fei
    [J]. 2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 2019, : 1153 - 1156
  • [36] Wavelet transform and fuzzy ARTMAP based pattern recognition for fast gas identification using a micro-hotplate gas sensor
    Llobet, E
    Brezmes, J
    Ionescu, R
    Vilanova, X
    Al-Khalifa, S
    Gardner, JW
    Bârsan, N
    Correig, X
    [J]. TRANSDUCERS '01: EUROSENSORS XV, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2001, : 1672 - 1675
  • [37] A TIN OXIDE THIN-FILM SENSOR WITH HIGH ETHANOL SENSITIVITY
    FANG, YK
    LEE, JJ
    [J]. THIN SOLID FILMS, 1989, 169 (01) : 51 - 56
  • [38] Surface ruthenated tin oxide thin-film as a hydrocarbon sensor
    Niranjan, RS
    Chaudhary, VA
    Sainkar, SR
    Patil, KR
    Vijayamohanan, K
    Mulla, IS
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 2001, 79 (2-3) : 132 - 136
  • [39] CMOS MICRO-HOTPLATE ARRAY DESIGN FOR NANOMATERIAL-BASED GAS SENSORS
    Udrea, F.
    Ali, S. Z.
    Gardner, J. W.
    [J]. CAS: 2008 INTERNATIONAL SEMICONDUCTOR CONFERENCE, PROCEEDINGS, 2008, : 143 - +
  • [40] On an indium-tin-oxide thin film based ammonia gas sensor
    Lin, Cheng-Wei
    Chen, Huey-Ing
    Chen, Tai-You
    Huang, Chien-Chang
    Hsu, Chi-Shiang
    Liu, Rong-Chau
    Liu, Wen-Chau
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 2011, 160 (01) : 1481 - 1484
12345