Micro-hotplate for integrated thin-film gas sensors

被引：0
|
作者：
Fung, Samuel K.H. [1 ]
Tang, Zhenan [1 ]
Chan, Philip C.H. [1 ]
Sin, Johnny K.O. [1 ]
Cheung, Peter W. [1 ]
机构：
[1] Hong Kong Univ of Science and, Technology, Hong Kong
来源：
Journal of the Chinese Institute of Electrical Engineering, Transactions of the Chinese Institute of Engineers, Series E/Chung KuoTien Chi Kung Chieng Hsueh K'an | 1995年 / 2卷 / 01期
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页码：75 / 79
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