Optimized multi-frequency temperature modulation of micro-hotplate gas sensors

被引:3
|
作者
Vergara, A [1 ]
Llobet, E [1 ]
Brezmes, J [1 ]
Vilanova, X [1 ]
Stankova, M [1 ]
Gràcia, I [1 ]
Cané, C [1 ]
Correig, X [1 ]
机构
[1] Univ Rovira & Virgili, Dept Elect Engn, Tarragona, Spain
关键词
temperature modulation; multi-sinusoldal signals; multi-level pseudo-random sequence (PRS) and micro-hotplate gas sensor;
D O I
10.1109/ICSENS.2004.1426444
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We demonstrate, for the first time, how it is possible to optimize a multi-frequency signal to be used in the modulation of the operating temperature of an integrated gas sensor microarray. In the first step, a multilevel pseudo-random sequence (MPRS), which allows for modulating the operating temperature of the sensors in a wide frequency range, is used to obtain an estimate of the impulse response of each microsensor-gas system. In the second step, by analyzing the spectral components of the impulse response estimates, the modulating frequencies that better help in discriminating the gases and gas mixtures considered are found. Finally, by selecting a subset of the best modulating frequencies (e.g. up to 5 frequencies), an optimized multi-frequency temperature modulating signal can be synthesized. The method is illustrated by analyzing different concentrations of NH(3), NO, and their mixtures using a microarray of WO(3)-based gas sensors.
引用
收藏
页码:1392 / 1395
页数:4
相关论文
共 50 条
  • [1] Optimized temperature modulation of micro-hotplate gas sensors through pseudorandom binary sequences
    Vergara, A
    Llobet, E
    Brezmes, J
    Vilanova, X
    Ivanov, P
    Gràcia, I
    Cané, C
    Correig, X
    IEEE SENSORS JOURNAL, 2005, 5 (06) : 1369 - 1378
  • [2] Design and simulations of SOICMOS micro-hotplate gas sensors
    Udrea, F
    Gardner, JW
    Setiadi, D
    Covington, JA
    Dogaru, T
    Lua, CC
    Milne, WI
    SENSORS AND ACTUATORS B-CHEMICAL, 2001, 78 (1-3) : 180 - 190
  • [3] FAST TEMPERATURE-PROGRAMMED SENSING FOR MICRO-HOTPLATE GAS SENSORS
    CAVICCHI, RE
    SUEHLE, JS
    KREIDER, KG
    GAITAN, M
    CHAPARALA, P
    IEEE ELECTRON DEVICE LETTERS, 1995, 16 (06) : 286 - 288
  • [4] Modeling micro-hotplate chemical gas sensors.
    Ding, JH
    McAvoy, TJ
    Adomaitis, R
    Semancik, S
    Cavicchi, R
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1999, 218 : U1065 - U1065
  • [5] High temperature degradation of Pt/Ti electrodes in micro-hotplate gas sensors
    Puigcorbé, J
    Vogel, D
    Michel, B
    Vilà, A
    Gràcia, I
    Cané, C
    Morante, JR
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2003, 13 (04) : S119 - S124
  • [6] Optimization of temperature programmed sensing for gas identification using micro-hotplate sensors
    Kunt, Tekin A.
    McAvoy, Thomas J.
    Cavicchi, Richard E.
    Semancik, Steve
    Sensors and Actuators, B: Chemical, 1998, B53 (1-2): : 24 - 43
  • [7] Optimization of temperature programmed sensing for gas identification using micro-hotplate sensors
    Kunt, TA
    McAvoy, TJ
    Cavicchi, RE
    Semancik, S
    SENSORS AND ACTUATORS B-CHEMICAL, 1998, 53 (1-2) : 24 - 43
  • [8] Optimised temperature modulation of metal oxide micro-hotplate gas sensors through multilevel pseudo random sequences
    Vergara, A
    Llobet, E
    Brezmes, J
    Ivanov, P
    Vilanova, X
    Gracia, I
    Cané, C
    Correig, X
    SENSORS AND ACTUATORS B-CHEMICAL, 2005, 111 : 271 - 280
  • [9] Micro-hotplate for integrated thin-film gas sensors
    Fung, Samuel K.H.
    Tang, Zhenan
    Chan, Philip C.H.
    Sin, Johnny K.O.
    Cheung, Peter W.
    Journal of the Chinese Institute of Electrical Engineering, Transactions of the Chinese Institute of Engineers, Series E/Chung KuoTien Chi Kung Chieng Hsueh K'an, 1995, 2 (01): : 75 - 79
  • [10] Optimized temperature-pulse sequences for the enhancement of chemically specific response patterns from micro-hotplate gas sensors
    Cavicchi, RE
    Suehle, JS
    Kreider, KG
    Gaitan, M
    Chaparala, P
    SENSORS AND ACTUATORS B-CHEMICAL, 1996, 33 (1-3) : 142 - 146