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- [22] REPRODUCIBILITY OF PROPERTIES OF SNOX THIN-FILMS PREPARED BY REACTIVE SPUTTERING ELECTROCOMPONENT SCIENCE AND TECHNOLOGY, 1985, 11 (04): : 271 - 280
- [29] TITANIUM NITRIDE THIN-FILMS DEPOSITED BY REACTIVE MAGNETRON SPUTTERING PLASMA SURFACE ENGINEERING, VOLS 1 AND 2, 1989, : 587 - 594