TITANIUM CARBIDE THIN-FILMS OBTAINED BY REACTIVE MAGNETRON SPUTTERING

被引：37
|
作者：
GEORGIEV, G
FESCHIEV, N
POPOV, D
UZUNOV, Z
机构：
来源：
VACUUM | 1986年 / 36卷 / 10期
关键词：
D O I：
10.1016/0042-207X(86)90327-1
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：595 / 597
页数：3
相关论文
共 50 条
  • [1] TITANIUM NITRIDE THIN-FILMS DEPOSITED BY REACTIVE MAGNETRON SPUTTERING
    GEORGIEV, GP
    POPOV, DN
    [J]. PLASMA SURFACE ENGINEERING, VOLS 1 AND 2, 1989, : 587 - 594
  • [2] Nanocrystalline titanium carbide thin films deposited by reactive magnetron sputtering
    Musil, J
    Hovorka, D
    Misina, M
    Bell, AJ
    Studnicka, V
    [J]. CZECHOSLOVAK JOURNAL OF PHYSICS, 1998, 48 (08) : 963 - 971
  • [3] SYNTHESIS AND CHARACTERIZATION OF TITANIUM HYDRIDE THIN-FILMS OBTAINED BY REACTIVE CATHODIC SPUTTERING
    MEUNIER, G
    MANAUD, JP
    GRALL, P
    [J]. MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1993, 18 (03): : 303 - 307
  • [4] RETRACTED ARTICLE: Nanocharacterization of Titanium Nitride Thin Films Obtained by Reactive Magnetron Sputtering
    Violeta Valentina Merie
    Marius Sorin Pustan
    Corina Bîrleanu
    Gavril Negrea
    [J]. JOM, 2017, 69 : 1455 - 1455
  • [5] DEPOSITION OF ALN THIN-FILMS BY MAGNETRON REACTIVE SPUTTERING
    GEROVA, EV
    IVANOV, NA
    KIROV, KI
    [J]. THIN SOLID FILMS, 1981, 81 (03) : 201 - 206
  • [6] Electrochemical behavior of titanium thin films obtained by magnetron sputtering
    Turcio-Ortega, David
    Rodil, Sandra Elizabeth
    Muhl, Stephen
    [J]. MATERIALS SCIENCE-MEDZIAGOTYRA, 2008, 14 (01): : 15 - 19
  • [7] PROPERTIES OF TITANIUM-TUNGSTEN THIN-FILMS OBTAINED BY MAGNETRON SPUTTERING OF COMPOSITE CAST TARGETS
    GLEBOVSKY, VG
    YASCHAK, VY
    BARANOV, VV
    SACKOVICH, EL
    [J]. THIN SOLID FILMS, 1995, 257 (01) : 1 - 6
  • [8] ALNX THIN-FILMS PRODUCED BY DC REACTIVE MAGNETRON SPUTTERING
    SVUB, J
    MUSIL, J
    [J]. CZECHOSLOVAK JOURNAL OF PHYSICS, 1985, 35 (10) : 1191 - 1192
  • [9] Structure and properties of ITO thin films obtained by reactive magnetron sputtering
    Zhidik, Yu.S.
    Chistoedova, A.A.
    Zhidik, E.V.
    Petryuk, A.E.
    [J]. Applied Physics, 2020, (02): : 59 - 63
  • [10] Optical properties of AlN thin films obtained by reactive magnetron sputtering
    Brudnik, A
    Czapla, A
    Kusior, E
    [J]. OPTICA APPLICATA, 2002, 32 (03) : 327 - 331
12345