MULTI-CHIP PROBE CARD FOR CAPACITANCE-VOLTAGE MEASUREMENTS.

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作者：

Hutchings, K.J.

Marsin, R.P.

Peterson, E.L.

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来源：

IBM technical disclosure bulletin | 1983年 / 25卷 / 11 A期

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摘要：

SEMICONDUCTOR DEVICE MANUFACTURE

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页码：5736 / 5737

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