CCVD: low-cost vapor-deposition of thin films in open atmosphere

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MicroCoating Technologies, Inc., 3901 Green Industrial Way, Chamblee, GA 30341, United States [1 ]
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Mater Res Soc Symp Proc | / 255-260期
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Chemical vapor deposition - Combustion - Composition - Oxygen - Stoichiometry - Vacuum applications;
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