CCVD: low-cost vapor-deposition of thin films in open atmosphere

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MicroCoating Technologies, Inc., 3901 Green Industrial Way, Chamblee, GA 30341, United States ^{[1
]}

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Mater Res Soc Symp Proc | / 255-260期

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Chemical vapor deposition - Combustion - Composition - Oxygen - Stoichiometry - Vacuum applications;

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[21] CHEMICAL VAPOR-DEPOSITION OF ALUMINUM SILICATE THIN-FILMS
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CHEATHAM, LK
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[22] PHYSICAL VAPOR-DEPOSITION OF MOLYBDENUM AND SILICON THIN-FILMS
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[23] FLOW PHENOMENA IN CHEMICAL VAPOR-DEPOSITION OF THIN-FILMS
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[24] THE PREPARATION OF THIN-FILMS BY PHYSICAL VAPOR-DEPOSITION METHODS
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[25] CHEMICAL VAPOR-DEPOSITION OF ZINC PHOSPHIDE THIN-FILMS
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[27] Fabrication and properties of epitaxial lithium niobate thin films by combustion chemical vapor deposition (CCVD)
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[28] THIN TIO2 FILMS PREPARED BY LOW-PRESSURE CHEMICAL VAPOR-DEPOSITION
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[29] FORMATION CONDITIONS AND STRUCTURE OF THIN CHROMIUM FILMS PREPARED BY LOW-TEMPERATURE VAPOR-DEPOSITION
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[30] LOW-PRESSURE CHEMICAL VAPOR-DEPOSITION OF BPSG FILMS
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