Oxygen trap hypothesis in silicon oxide

被引:0
|
作者
Kageshima, Hiroyuki [1 ]
Uematsu, Masahi [1 ]
Akiyama, Toru [2 ]
Ito, Tomonori [2 ]
机构
[1] NTT Basic Research Laboratories, NTT Corporation, 3-1 Morinosato-Wakamiya, Atsugi, Kanagawa 243-0198, Japan
[2] Department of Physics Engineering, Mie University, 1515 Kamihama, Tsu 514-8507, Japan
关键词
16;
D O I
暂无
中图分类号
学科分类号
摘要
Journal article (JA)
引用
收藏
页码:7672 / 7674
相关论文
共 50 条
  • [31] THIN BURIED OXIDE IN OXYGEN-IMPLANTED SILICON
    SPAGGIARI, C
    BERTONI, S
    CEROFOLINI, GF
    FUMAGALLI, P
    MEDA, L
    CERAMICS INTERNATIONAL, 1993, 19 (06) : 399 - 405
  • [32] EFFECT OF TRAP STATES AT THE OXIDE-SILICON INTERFACE IN POLYCRYSTALLINE SILICON THIN-FILM TRANSISTORS
    Gupta, Navneet
    INTERNATIONAL JOURNAL OF MODERN PHYSICS B, 2008, 22 (30): : 5357 - 5364
  • [33] TRANSIENT ISOTHERMAL GENERATION AT SILICON-SILICON OXIDE INTERFACE AND DIRECT DETERMINATION OF INTERFACE TRAP DISTRIBUTION
    SIMMONS, JG
    MAR, HA
    SOLID-STATE ELECTRONICS, 1976, 19 (05) : 369 - 374
  • [34] CHARACTERISTICS OF SILICON-OXIDE-SILICON STRUCTURE PRODUCED BY OXYGEN IMPLANTATION AND EPITAXY
    DAS, K
    SHORTHOUSE, GP
    BUTCHER, JB
    ANAND, KV
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1981, 128 (06) : C237 - C237
  • [35] Charge decay characteristics of silicon-oxide-nitride-oxide-silicon structure at elevated temperatures and extraction of the nitride trap density distribution
    Kim, TH
    Sim, JS
    Lee, JD
    Shim, HC
    Park, BG
    APPLIED PHYSICS LETTERS, 2004, 85 (04) : 660 - 662
  • [36] Extraction of nitride trap density from stress induced leakage current in silicon-oxide-nitride-oxide-silicon flash memory
    Gu, Shaw-Hung
    Wang, Tahui
    Lu, Wen-Pin
    Ku, Yen-Hui Joseph
    Lu, Chih-Yuan
    APPLIED PHYSICS LETTERS, 2006, 89 (16)
  • [37] Distinction between silicon and oxide traps using single-trap spectroscopy
    Fang, Wen
    Simoen, Eddy
    Aoulaiche, Marc
    Luo, Jun
    Zhao, Chao
    Claeys, Cor
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2015, 212 (03): : 512 - 517
  • [38] DETERMINATION OF THE FIXED OXIDE CHARGE AND INTERFACE TRAP DENSITIES FOR BURIED OXIDE LAYERS FORMED BY OXYGEN IMPLANTATION
    BRADY, FT
    LI, SS
    BURK, DE
    KRULL, WA
    APPLIED PHYSICS LETTERS, 1988, 52 (11) : 886 - 888
  • [39] PRELIMINARY TEST OF THE ECOLOGICAL TRAP HYPOTHESIS
    RATTI, JT
    REESE, KP
    JOURNAL OF WILDLIFE MANAGEMENT, 1988, 52 (03): : 484 - 491
  • [40] Process effect analysis on nitride trap distribution in silicon-oxide-nitride-oxide-silicon flash memory based on charge retention model
    Song, Yumin
    Jeong, Jun-Kyo
    Yang, Seung-Dong
    Park, Deok-Min
    Kang, Yun-mi
    Lee, Ga-Won
    MATERIALS EXPRESS, 2021, 11 (09) : 1615 - 1618