Structure and physical properties of Si-based BiFe0.95Mn0.05O3 ferroelectric capacitor using Ni-Al as the barrier layer

SrRuO3 (SRO)/BiFe0.95Mn0.05O3(BFMO)/SRO heterostructure capacitors were fabricated on Si substrates using Ni-Al as the barrier layer between Si and SRO. X-ray diffraction (XRD) reveals that the Ni-Al barrier is amorphous, while well-crytallinized BFMO film is polycrystalline. A good saturated hysteresis loop coude be obtained from the SRO/BFMO/SRO ferroelectric capacitor at 5 kHz. The experiment results show that BFMO capacitor possesses very good fatigue-resistance. The leakage mechanism of the SRO/BFMO/SRO ferroelectric capacitor was studied. SRO/BFMO/SRO capacitor satisfied the ohmic conduction behavior at applied fields lower than 210 kV/cm and bulk-limited space-charge-limited conduction (SCLC) at the applied fields higher than 210 kV/cm.