On-chip microfabricated high-performance embedded solenoid-inductors and transformers

被引：0
|
作者：
Wu, Zhengzheng [1 ]
Gu, Lei [1 ]
Li, Xinxin [1 ]
机构：
[1] Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
来源：
Jixie Gongcheng Xuebao/Chinese Journal of Mechanical Engineering | 2008年 / 44卷 / 11期
关键词：
D O I：
10.3901/JME.2008.11.034
中图分类号：
学科分类号：
摘要：
19
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页码：34 / 38
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