Development of multichannel ellipsometry with synchronously rotating polarizer and analyzer

被引：0
|
作者：
An, Ilsin [1 ,2 ]
Park, Myung-Gyu [1 ,2 ]
Bang, Kyung-Yoon [1 ,2 ]
Oh, Hye-Keun [1 ,2 ]
Kim, Hanjung [1 ,2 ]
机构：
[1] Department of Physics, Hanyang University, Ansan 425-791, Korea, Republic of
[2] Department of Control and Instrumentation, Hankyong National University, Ansung 456-749, Korea, Republic of
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2002年 / 41卷 / 6 A期
关键词：
Calibration - Data acquisition - Discrete Fourier transforms - Shafts (machine components);
D O I：
10.1143/jjap.41.3978
中图分类号：
学科分类号：
摘要：
Rotating-polarizer-and-analyzer-ellipsometry was developed with a multichannel detector. In this system, the transmission axes of the polarizer and analyzer rotated in phase using a flexible shaft for mechanical connection. With this configuration, autocalibration for the azimuths of the polarizer and analyzer was achieved. Thus, experimental error related to the calibration could be avoided and spectroscopic ellipsometry with the simplest operation principle was realized. Data acquisition time for 512-point ellipsometry spectra was 3 s over the photon energy range of 1.5 to 4.5 eV.
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页码：3978 / 3980
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