Rotating polarizer, compensator, and analyzer ellipsometry

被引：0
|
作者：
Sofyan A. Taya [1 ]
Taher M. El-Agez [1 ]
Anas A. Alkanoo [1 ]
机构：
[1] Physics Department, Islamic University of Gaza
来源：
Chinese Physics B | 2013年 / 22卷 / 12期
关键词：
ellipsometry; polarizer; analyzer; compensator;
D O I：
暂无
中图分类号：
O436.3 [偏振与色散];
学科分类号：
070207 ; 0803 ;
摘要：
In this paper we propose theoretically a set of ellipsometric configurations using a rotating polarizer, compensator, and analyzer at a speed ratio of N1ω:N2ω:N3ω. Different ellipsometric configurations can be obtained by giving different integral values to N1, N2, and N3. All configurations are applied to bulk c-Si and GaAs to calculate the real and imaginary parts of the refractive index of the samples. The accuracies of all ellipsometric configurations are investigated in the presence of a hypothetical noise and with small misalignments of the optical elements. Moreover, the uncertainties in the ellipsometric parameters as functions of the uncertainties of the Fourier coefficients are studied. The comparison among different configurations reveals that the rotating compensator–analyzer configuration corresponds to the minimum error in the calculated optical parameters.
引用
收藏
页码：186 / 197
页数：12
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