Effect of Ion Implantation on the Adhesion of Positive Diazoquinone-Novolak Photoresist Films to Single-Crystal Silicon

被引：0
|
作者：
Vabishchevich, S.A. [1 ]
Brinkevich, S.D. [2 ]
Prosolovich, V.S. [2 ]
Vabishchevich, N.V. [1 ]
Brinkevich, D.I. [2 ]
机构：
[1] Polotsk State University, Novopolotsk,211440, Belarus
[2] Belarusian State University, Minsk,220030, Belarus
来源：
Journal of Surface Investigation | 2020年 / 14卷 / 06期
关键词：
15;
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页码：1352 / 1357
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