Effect of Ion Implantation on the Adhesion of Positive Diazoquinone-Novolak Photoresist Films to Single-Crystal Silicon

被引：0
|
作者：
Vabishchevich, S.A. [1 ]
Brinkevich, S.D. [2 ]
Prosolovich, V.S. [2 ]
Vabishchevich, N.V. [1 ]
Brinkevich, D.I. [2 ]
机构：
[1] Polotsk State University, Novopolotsk,211440, Belarus
[2] Belarusian State University, Minsk,220030, Belarus
来源：
Journal of Surface Investigation | 2020年 / 14卷 / 06期
关键词：
15;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：1352 / 1357
相关论文
共 50 条
  • [21] Low energy model for ion implantation of arsenic and boron into (100) single-crystal silicon
    Obradovic, BJ
    Morris, SJ
    Morris, M
    Tian, S
    Wang, G
    Beardmore, K
    Snell, C
    Jackson, J
    Baumann, S
    Tasch, AF
    MICROELECTRONIC DEVICE TECHNOLOGY, 1997, 3212 : 342 - 353
  • [22] EXPLOSIVE CRYSTALLIZATION IN SINGLE-CRYSTAL SILICON AMORPHIZED BY IMPLANTATION
    BENSAHEL, D
    AUVERT, G
    DUPUY, M
    JOURNAL OF APPLIED PHYSICS, 1983, 54 (01) : 395 - 397
  • [23] BINARY COLLISION SIMULATIONS OF ION TRANSMISSION THROUGH SILICON SINGLE-CRYSTAL FILMS
    MURTHY, CS
    LOGAN, LR
    SRINIVASAN, GR
    RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1994, 130 : 175 - 186
  • [24] Dislocation-related luminescence in single-crystal silicon subjected to silicon ion implantation and subsequent annealing
    N. A. Sobolev
    A. M. Emel’yanov
    V. I. Sakharov
    I. T. Serenkov
    E. I. Shek
    D. I. Tetel’baum
    Semiconductors, 2007, 41 : 537 - 539
  • [25] Dislocation-related luminescence in single-crystal silicon subjected to silicon ion implantation and subsequent annealing
    Sobolev, N. A.
    Emel'yanov, A. M.
    Sakharov, V. I.
    Serenkov, I. T.
    Shek, E. I.
    Tetel'baum, D. I.
    SEMICONDUCTORS, 2007, 41 (05) : 537 - 539
  • [26] FORMATION OF SILVER SINGLE-CRYSTAL THIN-FILMS BY ARGON ION-IMPLANTATION
    ZHAO, YF
    YIN, D
    PANG, SJ
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 82 (04): : 533 - 538
  • [27] The study of ion mixed amorphous carbon films on single crystal silicon by C ion implantation
    Sun, Rong
    Xu, Tao
    Zhang, Jing-wei
    Xue, Qun-ji
    APPLIED SURFACE SCIENCE, 2006, 252 (12) : 4236 - 4243
  • [28] ION-IMPLANTATION IN SINGLE-CRYSTAL MAGNETIC FERRITE
    TAKAI, M
    RYSSEL, H
    LU, YF
    MINAMISONO, T
    NAMBA, S
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 39 (1-4): : 728 - 731
  • [29] NITROGEN ION-IMPLANTATION INTO ZNO SINGLE-CRYSTAL
    KOBAYASHI, K
    OHNO, H
    OKADA, G
    KUMANOTANI, J
    OKAMOTO, S
    DENKI KAGAKU, 1988, 56 (03): : 204 - 205
  • [30] GROWTH OF SINGLE-CRYSTAL FILMS OF CUBIC SILICON CARBIDE ON SILICON
    KHAN, IH
    SUMMERGRAD, RN
    APPLIED PHYSICS LETTERS, 1967, 11 (01) : 12 - +
12345