EXPLOSIVE CRYSTALLIZATION IN SINGLE-CRYSTAL SILICON AMORPHIZED BY IMPLANTATION

被引：7
|
作者：
BENSAHEL, D [1 ]
AUVERT, G [1 ]
DUPUY, M [1 ]
机构：
[1] LAB ELECTR & TECHNOL INFORMAT,CRM,F-38041 GRENOBLE,FRANCE
来源：
JOURNAL OF APPLIED PHYSICS | 1983年 / 54卷 / 01期
关键词：
D O I：
10.1063/1.331716
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：395 / 397
页数：3
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