EXPLOSIVE CRYSTALLIZATION IN SINGLE-CRYSTAL SILICON AMORPHIZED BY IMPLANTATION

被引：7
|
作者：
BENSAHEL, D [1 ]
AUVERT, G [1 ]
DUPUY, M [1 ]
机构：
[1] LAB ELECTR & TECHNOL INFORMAT,CRM,F-38041 GRENOBLE,FRANCE
来源：
JOURNAL OF APPLIED PHYSICS | 1983年 / 54卷 / 01期
关键词：
D O I：
10.1063/1.331716
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：395 / 397
页数：3
相关论文
共 50 条
  • [21] Dislocation-related luminescence in single-crystal silicon subjected to silicon ion implantation and subsequent annealing
    Sobolev, N. A.
    Emel'yanov, A. M.
    Sakharov, V. I.
    Serenkov, I. T.
    Shek, E. I.
    Tetel'baum, D. I.
    SEMICONDUCTORS, 2007, 41 (05) : 537 - 539
  • [22] DAMAGE STRUCTURE INDUCED BY HIGH-DOSE HELIUM IMPLANTATION INTO SINGLE-CRYSTAL SILICON
    KOTAI, E
    PASZTI, F
    MANUABA, A
    MEZEY, G
    GYULAI, J
    BARNA, A
    BARNA, P
    RADNOCZI, G
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 19-20 : 312 - 316
  • [23] Low energy model for ion implantation of arsenic and boron into (100) single-crystal silicon
    Obradovic, BJ
    Morris, SJ
    Morris, M
    Tian, S
    Wang, G
    Beardmore, K
    Snell, C
    Jackson, J
    Baumann, S
    Tasch, AF
    MICROELECTRONIC DEVICE TECHNOLOGY, 1997, 3212 : 342 - 353
  • [24] PREPARATION OF SINGLE-CRYSTAL SILICON PHOSPHIDE
    UGAI, YA
    SOKOLOV, LI
    GONCHAROV, EG
    LUKIN, AN
    INORGANIC MATERIALS, 1981, 17 (07) : 851 - 852
  • [25] Single-crystal silicon films on glass
    Gadkaree K.P.
    Soni K.
    Cheng S.-C.
    Kosik-Williams C.
    Journal of Materials Research, 2007, 22 (9) : 2363 - 2367
  • [26] IMPURITIES AND DEFECTS IN SILICON SINGLE-CRYSTAL
    MEDA, L
    CEROFOLINI, GF
    QUEIROLO, G
    PROGRESS IN CRYSTAL GROWTH AND CHARACTERIZATION OF MATERIALS, 1987, 15 (02) : 97 - 134
  • [27] THICKNESS MEASURES OF SINGLE-CRYSTAL SILICON
    OKSANICH, AP
    BABADZHANOV, LS
    MEASUREMENT TECHNIQUES, 1978, 21 (08) : 1098 - 1099
  • [28] The molar volume of single-crystal silicon
    Becker, P
    METROLOGIA, 2001, 38 (01) : 85 - 86
  • [29] FRACTAL FRACTURE OF SINGLE-CRYSTAL SILICON
    TSAI, YL
    MECHOLSKY, JJ
    JOURNAL OF MATERIALS RESEARCH, 1991, 6 (06) : 1248 - 1263
  • [30] Reshaping of single-crystal silicon microstructures
    Yang, EH
    Fujita, H
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1999, 38 (3A): : 1580 - 1583
12345