Fabrication of a Silicon Electron Multiplier sensor using metal assisted chemical etching and its characterisation

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作者：
Halvorsen, Marius Mæhlum [1 ,2 ]
Coco, Victor [1 ]
Collins, Paula [1 ]
Sandaker, Heidi [2 ]
Romano, Lucia [3 ,4 ]
机构：
[1] CERN EP-LBD, Esplanade des Particules 1, Meyrin,1211, Switzerland
[2] University of Oslo, Department of Physics, Oslo,0315, Norway
[3] Institute for Biomedical Engineering, University and ETH Zürich, Zürich,8092, Switzerland
[4] Paul Scherrer Institute, Forschungsstrasse 111, Villigen,CH-5232, Switzerland
来源：
Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment | 2024年 / 1060卷
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