Fabrication of porous silicon-based optical sensors using metal-assisted chemical etching

被引：26
|
作者：
Balderas-Valadez, R. F. [1 ]
Agarwal, V. [1 ]
Pacholski, C. [2 ,3 ]
机构：
[1] UAEM, CIICAp, Av Univ 1001 Col Chamilpa, Cuernavaca 62210, Morelos, Mexico
[2] Max Planck Inst Intelligent Syst, Dept New Mat & Biosyst, Heisenbergstr 3, D-70569 Stuttgart, Germany
[3] Univ Potsdam, Inst Chem, Muhlenberg 3, D-14476 Potsdam, Germany
来源：
RSC ADVANCES | 2016年 / 6卷 / 26期
关键词：
FOURIER-TRANSFORM SPECTROSCOPY; NANOSTRUCTURES; NANOWIRES;
D O I：
10.1039/c5ra26816h
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
Optical biosensors based on porous silicon were fabricated by metal assisted chemical etching. Thereby double layered porous silicon structures were obtained consisting of porous pillars with large pores on top of a porous silicon layer with smaller pores. These structures showed a similar sensing performance in comparison to electrochemically produced porous silicon interferometric sensors.
引用
收藏
页码：21430 / 21434
页数：5
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