TAPERED WINDOWS IN SIO2 BY ION-IMPLANTATION

被引：23

|

作者：

MOLINE, RA

BUCKLEY, RR

HASZKO, SE

MACRAE, AU

机构：

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1973年 / ED20卷 / 09期

关键词：

D O I：

10.1109/T-ED.1973.17753

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

收藏

页码：840 / 840

页数：1

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