TAPERED WINDOWS IN SIO2 BY ION-IMPLANTATION

被引：23
|
作者：
MOLINE, RA
BUCKLEY, RR
HASZKO, SE
MACRAE, AU
机构：
来源：
IEEE TRANSACTIONS ON ELECTRON DEVICES | 1973年 / ED20卷 / 09期
关键词：
D O I：
10.1109/T-ED.1973.17753
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：840 / 840
页数：1
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