NATURE OF DISORDERED LAYER PRODUCED BY ION-IMPLANTATION

被引：4
|
作者：
ZELLAMA, K [1 ]
GERMAIN, P [1 ]
SQUELARD, S [1 ]
BOURGOIN, JC [1 ]
PIAGUET, J [1 ]
ROBIC, JY [1 ]
机构：
[1] CEN,LETI MEP,F-38041 GRENOBLE,FRANCE
来源：
SOLID STATE COMMUNICATIONS | 1978年 / 26卷 / 12期
关键词：
D O I：
10.1016/0038-1098(78)91248-6
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
引用
收藏
页码：901 / 905
页数：5
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