GAAS HALL DEVICES PRODUCED BY LOCAL ION-IMPLANTATION

被引：8
|
作者：
PETTENPAUL, E [1 ]
HUBER, J [1 ]
WEIDLICH, H [1 ]
FLOSSMANN, W [1 ]
VONBORCKE, U [1 ]
机构：
[1] SIEMENS AG,D-8400 REGENSBURG,FED REP GER
来源：
SOLID-STATE ELECTRONICS | 1981年 / 24卷 / 08期
关键词：
D O I：
10.1016/0038-1101(81)90060-5
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：781 / 786
页数：6
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