GALLIUM-ARSENIDE FIELD-EFFECT TRANSISTORS BY ION-IMPLANTATION

被引:27
|
作者
WELCH, BM [1 ]
EISEN, FH [1 ]
HIGGINS, JA [1 ]
机构
[1] ROCKWELL INT,SCI CTR,THOUSAND OAKS,CA 91360
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D O I
10.1063/1.1663838
中图分类号
O59 [应用物理学];
学科分类号
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页码:3685 / 3687
页数:3
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