LASER SELF-ALIGNED SYNTHESIS OF TISI2

被引：1
|
作者：
CRACIUN, V [1 ]
CRACIUN, D [1 ]
CHITICA, N [1 ]
MIHAILESCU, IN [1 ]
BERTOLOTTI, M [1 ]
机构：
[1] UNIV ROMA I,DIPARTIMENTO ENERGET,ROME,ITALY
来源：
APPLIED SURFACE SCIENCE | 1992年 / 54卷
关键词：
D O I：
10.1016/0169-4332(92)90072-6
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
The temperature distribution induced by a laser pulse in a thin film whose thickness is less than the heat diffusion length, is greatly influenced by the thermal properties of the substrate. Based upon this effect, a new self-aligned method for titanium silicide synthesis is reported.
引用
收藏
页码：362 / 365
页数：4
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