LASER SELF-ALIGNED SYNTHESIS OF TISI2

被引：1

作者：

CRACIUN, V ^{[1
]}

CRACIUN, D ^{[1
]}

CHITICA, N ^{[1
]}

MIHAILESCU, IN ^{[1
]}

BERTOLOTTI, M ^{[1
]}

机构：

[1] UNIV ROMA I,DIPARTIMENTO ENERGET,ROME,ITALY

来源：

APPLIED SURFACE SCIENCE | 1992年 / 54卷

关键词：

D O I：

10.1016/0169-4332(92)90072-6

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The temperature distribution induced by a laser pulse in a thin film whose thickness is less than the heat diffusion length, is greatly influenced by the thermal properties of the substrate. Based upon this effect, a new self-aligned method for titanium silicide synthesis is reported.

引用

页码：362 / 365

页数：4

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