THERMAL-OXIDATION KINETICS OF SILICON IN OXYGEN IN THE PRESENCE OF ANTIMONY AND BISMUTH CHLORIDES

被引：0

作者：

UGAI, YA

ANOKHIN, VZ

MITTOVA, IY

MYACHIN, SM

PONOMAREVA, NI

机构：

来源：

ZHURNAL FIZICHESKOI KHIMII | 1981年 / 55卷 / 04期

关键词：

D O I：

暂无

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：946 / 949

页数：4

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