COMPARATIVE EFFECT OF CRACKS AND DISLOCATIONS ON THERMAL-OXIDATION KINETICS OF SILICON

被引：0
|
作者：
UGAI, YA [1 ]
ANOKHIN, VZ [1 ]
PONYAVINA, SS [1 ]
机构：
[1] VORONEZH STATE UNIV,VORONEZH,USSR
来源：
ZHURNAL FIZICHESKOI KHIMII | 1977年 / 51卷 / 02期
关键词：
D O I：
暂无
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
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页码：482 / 483
页数：2
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