共 50 条
- [1] THERMAL-OXIDATION KINETICS OF SILICON IN WATER-VAPOR IN THE PRESENCE OF INDIUM CHLORIDE [J]. ZHURNAL FIZICHESKOI KHIMII, 1983, 57 (01): : 79 - 81
- [3] KINETICS THEORY OF THERMAL-OXIDATION OF SILICON [J]. SCIENCE IN CHINA SERIES A-MATHEMATICS PHYSICS ASTRONOMY, 1989, 32 (10): : 1270 - 1280
- [4] THERMAL-OXIDATION KINETICS OF SILICON IN OXYGEN IN THE PRESENCE OF ANTIMONY AND BISMUTH CHLORIDES [J]. ZHURNAL FIZICHESKOI KHIMII, 1981, 55 (04): : 946 - 949
- [5] KINETICS OF RAPID THERMAL-OXIDATION OF SILICON [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1992, 31 (10): : 3436 - 3439
- [6] KINETICS AND MECHANISM OF TRANSIENT THERMAL-OXIDATION OF SILICON [J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1986, 96 (01): : 11 - 18
- [9] THERMAL-OXIDATION OF SILICON IN PRESENCE OF ANTIMONY OXIDE [J]. ZHURNAL FIZICHESKOI KHIMII, 1976, 50 (12): : 3094 - 3096
- [10] EFFECT OF GALLIUM CHLORIDE ON KINETICS AND THERMAL-OXIDATION MECHANISM OF SILICON IN A WATER-VAPOR [J]. ZHURNAL FIZICHESKOI KHIMII, 1982, 56 (07): : 1610 - 1612