THERMAL-OXIDATION KINETICS OF SILICON IN THE PRESENCE OF LEAD CHLORIDE

被引:0
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作者
UGAI, YA
ANOKHIN, VZ
MITTOVA, IY
PONOMAREVA, NI
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ZHURNAL FIZICHESKOI KHIMII | 1981年 / 55卷 / 10期
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O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
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页码:2672 / 2675
页数:4
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