THERMAL-OXIDATION KINETICS OF SILICON IN OXYGEN IN THE PRESENCE OF ANTIMONY AND BISMUTH CHLORIDES

被引：0
|
作者：
UGAI, YA
ANOKHIN, VZ
MITTOVA, IY
MYACHIN, SM
PONOMAREVA, NI
机构：
来源：
ZHURNAL FIZICHESKOI KHIMII | 1981年 / 55卷 / 04期
关键词：
D O I：
暂无
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：946 / 949
页数：4
相关论文
共 50 条
  • [31] SIMULATION OF SILICON THERMAL-OXIDATION
    LEE, CM
    PHYSICAL REVIEW B, 1987, 36 (05): : 2793 - 2798
  • [32] THERMAL-OXIDATION KINETICS OF (100)SILICON AND (111)SILICON IN NITROUS-OXIDE
    DEMEO, RC
    CHOW, TP
    APPLIED PHYSICS LETTERS, 1995, 67 (04) : 500 - 502
  • [33] MODELING OF THERMAL-OXIDATION OF SILICON
    SINGH, SK
    SCHLUP, JR
    FAN, LT
    SUR, B
    INDUSTRIAL & ENGINEERING CHEMISTRY RESEARCH, 1988, 27 (09) : 1707 - 1714
  • [34] ELECTROMIGRATION OF OXYGEN-CONTAINING IONS AT THE THERMAL-OXIDATION OF SILICON
    UGAI, JA
    KHOVIV, AM
    ANOKHIN, VZ
    MALEVSKAIA, LA
    MITTOVA, IJ
    DOKLADY AKADEMII NAUK SSSR, 1982, 267 (01): : 144 - 146
  • [35] O-18 STUDY OF THE THERMAL-OXIDATION OF SILICON IN OXYGEN
    ROSENCHER, E
    STRABONI, A
    RIGO, S
    AMSEL, G
    APPLIED PHYSICS LETTERS, 1979, 34 (04) : 254 - 256
  • [36] KINETICS OF SILICON OXIDATION IN THE PRESENCE OF GALLIUM, INDIUM AND GERMANIUM CHLORIDES
    MITTOVA, IY
    PONOMAREVA, NI
    KHOVIV, AM
    ANOKHIN, VZ
    ZHURNAL FIZICHESKOI KHIMII, 1986, 60 (05): : 1297 - 1299
  • [37] RAPID THERMAL-OXIDATION OF SILICON
    ANG, ST
    WORTMAN, JJ
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1986, 133 (11) : 2361 - 2362
  • [38] RAPID THERMAL-OXIDATION OF SILICON
    MOSLEHI, MM
    SHATAS, SC
    SARASWAT, KC
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1986, 133 (03) : C101 - C101
  • [39] KINETICS OF RAPID THERMAL-OXIDATION
    DEARAUJO, CAP
    GALLEGOS, RW
    HUANG, YP
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1989, 136 (09) : 2673 - 2676
  • [40] THERMAL-OXIDATION OF SILICIDES ON SILICON
    DHEURLE, FM
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1988, 135 (03) : C134 - C134
12345