EFFICIENT DOPING OF GAAS BY SE+ ION IMPLANTATION

被引:0
|
作者
FOYT, AG
DONNELLY, JP
LINDLEY, WT
机构
来源
关键词
D O I
暂无
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
引用
收藏
页码:395 / &
相关论文
共 50 条
  • [1] EFFICIENT DOPING OF GAAS BY SE+ ION IMPLANTATION
    FOYT, AG
    DONNELLY, JP
    LINDLEY, WT
    [J]. APPLIED PHYSICS LETTERS, 1969, 14 (12) : 372 - &
  • [2] SE+ ION-IMPLANTATION INTO ENCAPSULATED GAAS
    SHAHID, MA
    GWILLIAM, R
    SEALY, BJ
    [J]. ELECTRONICS LETTERS, 1985, 21 (17) : 729 - 730
  • [3] TEM STRUCTURAL STUDIES ON SE+ IMPLANTED GAAS
    SADANA, DK
    BOOKER, GR
    [J]. RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1979, 42 (1-2): : 35 - 43
  • [4] RECENT DEVELOPMENTS IN ION-IMPLANTATION DOPING OF GAAS
    EISEN, FH
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1977, 14 (01): : 530 - 530
  • [5] SE+ AND SN+ IMPLANTS FOR N+ LAYERS IN GAAS
    PATEL, KK
    BENSALEM, R
    SHAHID, MA
    SEALY, BJ
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR): : 418 - 422
  • [6] Defect tuning of GaAs doping superlattices by hydrogen ion implantation
    Brink, DJ
    Haile, KM
    Kunert, HW
    [J]. PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2005, 202 (04): : 636 - 641
  • [7] Formation of nanoclusters with varying Pb/Se concentration and distribution after sequential Pb+ and Se+ ion implantation into SiO2
    Markwitz, A.
    Carder, D. A.
    Hopf, T.
    Kennedy, J.
    Chan, T. K.
    Muecklich, A.
    Osipowicz, T.
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2012, 273 : 199 - 202
  • [8] REDISTRIBUTION OF MANGANESE AFTER ANNEALING OF GAAS IMPLANTED WITH SI+ AND SE+
    KANBER, H
    FENG, M
    WHELAN, JM
    [J]. APPLIED PHYSICS LETTERS, 1982, 40 (11) : 960 - 962
  • [9] Overcoming the doping limit in GaAs by ion implantation and pulsed laser melting
    Yu, Kin Man
    Scarpulla, M. A.
    Ho, Chun Yuen
    Dubon, O. D.
    Walukiewicz, W.
    [J]. JOURNAL OF APPLIED PHYSICS, 2024, 135 (04)
  • [10] P-N-JUNCTION PBS1-XSEX PHOTODIODES FABRICATED BY SE+ ION-IMPLANTATION
    DONNELLY, JP
    HARMAN, TC
    [J]. SOLID-STATE ELECTRONICS, 1975, 18 (03) : 288 - 290